Low Coherence Interferometer

Production ready, 4 inch or 6 inch aperture downward looking flatness interferometer, high in features, low in cost! The industry unique OptoFlat is a low cost-of-ownership, turn-key system with an ultra-stable, rigid mechanical design in a small footprint. Easy loading of part on stage and "hand-wave" sensor to initiate test, OptoFlat offers quick part-to-part measurements without operator keyboard input. Years of experience in interferometric methods have contributed to the advanced technology and features built into OptoFlat. Learn more in our TECHNOLOGY section.

Proprietary, engineered coherence interferometry

OptoFlat was designed as a low coherence interferometer to measure plane-parallel transparent polished surfaces without special treatment of the backside. Thin glass wafers and disks of 300 microns thickness or more are easily measured. Just position on the integrated stage, adjust focus position and tilt and with a wave of the hand, a measurement of flatness is performed.

Sub-nanometer measurements are routine. No other interferometer in this price range can compete with the precision and capabilities for measurement of flatness and transmitted wavefront of plano optical components.

Interference artifacts are suppressed or totally eliminated through the engineered coherence of the novel OptoFlat design. By using an extended source, dust, scratches and nanometer scale surface variations within the optical train do not produce artifacts in the measurement. Polish process fingerprints are clearly seen. Improvements can rapidly be made to a process by using OptoFlat to monitor and document successive iterations.

InterVue Software

InterVue Main Screen

Main screen shows fringes, tip/tilt alignment and z-position for easy adjustment.

InterVue Measurement Results Screen

Top surface of microscope slide. Select display of four maps: Fringes, Total Surface Deviation, Irregularity and Filtered Residual Maps. Measurement results according to ISO-10110 standards.

Continuous History of Results

Track statistics of multiple measurement results. Batch processing for production quality control.

Optional Accessories

Air Shield

For turbulent lab conditions, an optional air shield reduces effects of air variations.

Transmitted Wavefront Measurement Accessory

Assembly for transmitted wavefront testing includes 100 mm or 150 mm diameter reflection flat. Unit mounts on the OptoFlat stage and incorporates an adjustable 3-jaw holder and flip-in shield to protect the reflection flat.